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capaNCDT 6500

Nanometer multi-channel system

Capacitive multi-channel system for maximum resolution

Capacitive displacement sensors are designed for measurement tasks that require extremely high precision. The capaNCDT 6500 capacitive multi-channel system is ideally suited to reliable measurements down to sub-nanometre resolution. The controller offers a maximum response rate of 7.8kHz (digital, with up to four channels) or a frequency response of 8.5kHz. As well as an analogue output, an EtherCAT interface is also available. EtherCAT enables accurate data transmission in real time, with high speed integration into the existing measurement environment and synchronisation of two systems. Set up and configuration of the capaNCDT 6500 system are carried out easily using a web browser.

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Characteristics

  1. Measuring ranges (mm): 0.05 | 0.2 | 0.5 | 0.8 | 1 | 2 | 3 | 5 | 10
  2. Resolution max. 0.0375nm
  3. Linearity max. 0.01µm
  4. Frequency response 8.5kHz (-3dB)
  5. Data rate (digital output) 7.8kHz
  6. Analogue output (voltage/current)
  7. Ethernet, EtherCAT
  8. Modular – up to 8 channels
  9. External or internal preamplifier
  10. User-friendly set up and configuration via web interface
[{"activity":"US_ME_R0-NCSC","address":"8120 Brownleigh Dr.\r\nRaleigh, NC 27617","central":false,"comment":"CT, DC, DE, MA, MD, ME,\r\nNH, NJ, NY, PA, RI, VT","companyName":"Micro-Epsilon America | East Regional Office","countries":"220","deZip":"","email":"efrain.arredondo@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1811},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1653},"mobile":"919 400 3845","name":"Efrain Arredondo","phone1":"919 787 9707","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8271,"type":null,"uid":116,"usStates":"14,15,32,31,29,40,41,43,51,53,59,16","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R2-Mid-West","address":"1246 Woburn Dr\r\nLemont, IL 60439","central":false,"comment":"IL: 600-619,\r\nIN, KY, MI, OH,\r\nPA: 150-167,\r\nWI: 530-539, 541-545, 549, \r\nWV","companyName":"Micro-Epsilon America | Mid West Regional Office","countries":"220","deZip":"","email":"steve.sochowski@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"630 243-0997","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1812},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1663},"mobile":"847 420 4781","name":"Steve Sochowski","phone1":"630 243-0980","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":8272,"type":null,"uid":117,"usStates":"23,24,27,33,47,51,64,63","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R3-West","address":"San Clemente, CA 92673","central":false,"comment":"AK, CA, HI, NV, OR, WA","companyName":"Micro-Epsilon America | Western Regional Office","countries":"220","deZip":"","email":"jerry.carayanis@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1813},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1654},"mobile":"","name":"Jerry Carayanis","phone1":"310 729 0954","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":8273,"type":null,"uid":118,"usStates":"2,12,21,39,49,62","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R6-Northern","address":"4749 Bennett Drive, Suite J\r\nLivermore, CA 94551","central":false,"comment":"CA: 932, 934, 936 - 961 (Northern Cal)","companyName":"Micro-Epsilon America | Northern California Direct Office","countries":"220","deZip":"","email":"leon.renner@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"925 371 5673","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":53105},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1657},"mobile":"","name":"Leon Renner","phone1":"984 888 6555","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":8274,"type":null,"uid":121,"usStates":"12","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R4-South","address":"Denver, CO 80227","central":false,"comment":"AZ, CO, IA, ID,\r\nIL: 620-629, \r\nKS, LA, MN, MO, MT, ND, NE, NM, OK, SD, TX, UT,\r\nWI: 540, 546-548, \r\nWY","companyName":"Micro-Epsilon America | Central Regional Office","countries":"220","deZip":"","email":"friedrich.gebessler@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1814},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1655},"mobile":"919 412 3620","name":"Friedrich \u0022Fritz\u0022 Gebessler","phone1":"","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":8275,"type":null,"uid":119,"usStates":"4,13,25,22,23,26,28,34,36,37,45,38,42,48,55,57,58,64,65","website":"www.micro-epsilon.com","worldwide":true},{"activity":"US_ME_R5-Southeast","address":"8120 Brownleigh Dr.\r\nRaleigh NC 27617","central":false,"comment":"AL, AR, FL, GA, MS, NC, \r\nSC, TN, VA","companyName":"Micro-Epsilon America | South East Regional Office","countries":"220","deZip":"","email":"tim.prentice@micro-epsilon.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"919 787 9706","hidePlz":false,"image":{"originalResource":{},"pid":358,"uid":1815},"internalNote":"","lName":"","map":{"originalResource":{},"pid":358,"uid":1656},"mobile":"","name":"Tim Prentice","phone1":"919 649 9805","phone2":"919 787 9707","pid":358,"products":"","regional":false,"showMail":false,"sorting":8276,"type":null,"uid":120,"usStates":"1,5,18,19,35,44,54,56,61","website":"www.micro-epsilon.com","worldwide":true},{"activity":"USREP_IRI","address":"9415 West Forest Home ave\r\nSuite 101\r\nWI 53130","central":false,"comment":"IL","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"tim@irisensors.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"815 520-0344","name":"Tim Fauser","phone1":"952-797-0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8221,"type":null,"uid":162,"usStates":"23","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_TandM-Instruments","address":"15902 Soleil Ct\r\nAustin, TX 78734","central":false,"comment":"LA, OK, TX","companyName":"T\u0026M Instruments","countries":"220","deZip":"","email":"sales@tandm.net","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"512-532-6130","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"T\u0026M Instruments","phone1":"512-772-1553","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8222,"type":null,"uid":171,"usStates":"28,48,57","website":"www.tandm.net","worldwide":true},{"activity":"USREP_Process-Technology_NM","address":"3301 Wellington Place\r\nFarmington, NM 87402","central":false,"comment":"NM","companyName":"Process Technology, Inc.","countries":"220","deZip":"","email":"joshg@process-tech.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"505 948 3302","name":"Josh Gordon","phone1":"","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8223,"type":null,"uid":169,"usStates":"42","website":"www.process-tech.com","worldwide":true},{"activity":"USREP_Process-Technology","address":"4084 South 300 West\r\nSalt Lake City, UT 84107","central":false,"comment":"ID, MT, UT, WY","companyName":"Process Technology, Inc.","countries":"220","deZip":"","email":"mikeh@process-tech.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"385 322 3053","name":"Mike Hallenbeck","phone1":"801 264 1114","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8224,"type":null,"uid":168,"usStates":"22,37,58,65","website":"www.process-tech.com","worldwide":true},{"activity":"USREP_Analectro","address":"3219 Route 38, Suite 2\r\nMt. Laurel, NJ 08054","central":false,"comment":"DC, DE, MD, NJ\r\nPA: 168 - 196","companyName":"Analectro","countries":"220","deZip":"","email":"sales@analectro.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"856 795 4597","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Al Reithmeier, Kevin Corcoran","phone1":"856 795 6676","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8225,"type":null,"uid":154,"usStates":"16,15,31,41,51","website":"www.analectro.com","worldwide":true},{"activity":"USREP_Dempsco","address":"7015 Corporate Way\r\nDayton, OH 45459","central":false,"comment":"KY, IN, WV, \r\nOH: 430-433, 437-459\r\nPA: 150-167","companyName":"Dempsco","countries":"220","deZip":"","email":"info@dempsco.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"937 434 8860","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Kurt Jacoby, Chris Jacoby","phone1":"937 436 1000","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8226,"type":null,"uid":160,"usStates":"27,24,63,47,51","website":"www.dempsco.com","worldwide":true},{"activity":"USREP_Preferred_Technical_Resources","address":"28525 Beck Road, Suite 109\r\nWixom, MI 48393","central":false,"comment":"MI, OH: 434 - 436","companyName":"Preferred Technical Resources","countries":"220","deZip":"","email":"sales@ptrsales.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"248 668 9059","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Philip Theaker, John Callaghan","phone1":"248 668 9051","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8227,"type":null,"uid":167,"usStates":"33,47","website":"www.ptrsales.com","worldwide":true},{"activity":"USREP_MCT_RAM","address":"2 W Main St, Suite 300\r\nVictor, NY 14564","central":false,"comment":"NY 120 - 123, 128 - 149","companyName":"MCT\/RAM - Corporate Office","countries":"220","deZip":"","email":"sales@mctram.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"585 461 2114","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"John Saporito","phone1":"585 461 2110","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8228,"type":null,"uid":165,"usStates":"43","website":"www.mctram.com","worldwide":true},{"activity":"USREP_MCT_RAM1","address":"4 Marina Lane\r\nE. Patchogue, NY 11772","central":false,"comment":"NY 100 - 119, 124 - 127","companyName":"MCT\/RAM - Lower New York and New York City","countries":"220","deZip":"","email":"johng@mctram.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"585-461-2114","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"John Gustafson","phone1":"631-286-7374","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8229,"type":null,"uid":166,"usStates":"43","website":"www.mctram.com","worldwide":true},{"activity":"USREP_IRI","address":"9415 West Forest Home ave\r\nSuite 101\r\nWI 53130","central":false,"comment":"WI: 530 - 539, 541 - 545, 549","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"jkorus@irisensors.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"414- 458-9325","name":"Jon Korus","phone1":"952-797-0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8230,"type":null,"uid":163,"usStates":"64","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_IRI","address":"13774 Reimer Drive North \r\nMaple Grove, MN 55311","central":false,"comment":"IA, KS, MN, MO, ND, NE, SD,\r\nWI: 540, 546 - 548","companyName":"Instrumentation Resources","countries":"220","deZip":"","email":"irisales@irisensors.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"952 797 0223","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Tony Marquette","phone1":"952 797 0220","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8231,"type":null,"uid":164,"usStates":"25,26,34,36,45,38,55,64","website":"www.irisensors.com","worldwide":true},{"activity":"USREP_Equipoise","address":"4059 N Haight Ave\r\nPortland, OR 97227-1332","central":false,"comment":"OR, WA","companyName":"Equipoise Technologies, LLC","countries":"220","deZip":"","email":"eq@equipoisetech.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Ed Querfeld","phone1":"503 708 9969","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8232,"type":null,"uid":161,"usStates":"49,62","website":"www.equipoisetech.com","worldwide":true},{"activity":"USREP_CASECO","address":"508 Queens Court\r\nFranklin, TN 37064","central":false,"comment":"AL, AR, MS, TN\r\nFL: 324 - 325","companyName":"CASECO","countries":"220","deZip":"","email":"timdiperi@caseco-inc.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"615 591-7399","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"615 210-7311","name":"Tim DiPeri","phone1":"615 591-7399","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8233,"type":null,"uid":159,"usStates":"1,5,35,56,18","website":"www.caseco-inc.com","worldwide":true},{"activity":"USREP_CAL_Industrial_Sales_Co","address":"4749 Bennett Drive, Suite J\r\nLivermore, CA 94551","central":false,"comment":"CA: 932, 934, 936 - 961 (Northern Cal)\r\nNV: 892 - 898","companyName":"CAL Industrial Sales Co.","countries":"220","deZip":"","email":"leenorthcutt@calindustrial.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"925 371 5673","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Dave Richardson, Bob McCartney","phone1":"925 371 8125","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8234,"type":null,"uid":158,"usStates":"39,12","website":"www.calindustrial.com","worldwide":true},{"activity":"USREP_Andruss_Peskin","address":"41 Westech Drive\r\nTyngsboro, MA 01879","central":false,"comment":"CT, RI","companyName":"Andruss Peskin Corp.","countries":"220","deZip":"","email":"sales@a-pcorp.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"508 351 6207","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"508-259-9895","name":"Mark Denison","phone1":"508 351 6200","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8235,"type":null,"uid":157,"usStates":"14,53","website":"www.a-pcorp.com","worldwide":true},{"activity":"USREP_Andruss_Peskin","address":"41 Westech Drive\r\nTyngsboro, MA 01879","central":false,"comment":"ME, NH, VT","companyName":"Andruss Peskin Corp.","countries":"220","deZip":"","email":"sales@a-pcorp.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"508 351 6207","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"603-969-6122","name":"Jeff Wilkins","phone1":"508 351 6200","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8236,"type":null,"uid":156,"usStates":"29,40,59","website":"www.a-pcorp.com","worldwide":true},{"activity":"USREP_Andruss_Peskin","address":"41 Westech Drive\r\nTyngsboro, MA 01879","central":false,"comment":"","companyName":"Andruss Peskin Corp.","countries":"220","deZip":"","email":"sales@a-pcorp.com","emailCc":"","fName":"","fallback":false,"fallbackPagesearch":false,"fax":"508 351 6207","hidePlz":false,"image":null,"internalNote":"","lName":"","map":null,"mobile":"","name":"Jeff Wilkins, Mark Denison","phone1":"508 351 6200","phone2":"","pid":358,"products":"","regional":false,"showMail":false,"sorting":8240,"type":null,"uid":155,"usStates":"32","website":"www.a-pcorp.com","worldwide":true}]
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Maximum resolution

The capaNCDT 6500 system is designed for measurements tasks that require sub-nanometre resolution. Its strengths are demonstrated particularly well in positioning tasks in the semiconductor industry and laboratory applications. The modular capaNCDT 6500 is designed for multi-channel applications. Up to eight sensors can be connected via a preamplifier to the signal conditioning electronics.

Ease of use via web interface

Due to a user-friendly web interface, the entire configuration process of controller and sensors is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options for filters, arithmetic links and other useful parameters such as triggering, measurement value storage and linearisation.

The capacitive DT6530 controller offers maximum resolution and signal stability for capacitive displacement measurement. The controller can be operated with up to 8 channels and is not only suitable for electrically conductive objects, but also for insulators. In addition to analogue outputs, the controller is also equipped with an Ethernet digital interface. The DT6530 controller is compatible with all sensors and cables of the capaNCDT series.

Characteristics

  1. Resolution dynamic 0.002 % FSO (8.5kHz)

  2. Frequency response 8.5kHz (-3 dB) (switchable 20Hz; 1kHz; 8.5kHz)

  3. Analogue output 0...10V (short circuit proof), 4...20mA; 0...20mA

  4. Digital interface Ethernet 24 Bit; EtherCAT

  5. Special tuning: up to quadruple standard cable length

The mounting frame is designed for use with capacitive sensors for two-sided thickness measurements and helps to align the measuring points with one another. The frame allows for the sensors to lie exactly on one axis, meaning that the measuring points are arranged congruently. This prevents measurements at an offset and a reliable measurement result is achieved with the highest possible precision. The mounting frames provide space for up to 6 sensors. Two sensors each form a measuring point.

Characteristics

  1. Multi-track thickness measurement at up to 3 points simultaneously

  2. High temperature stability for precise measurements at temperatures of up to 100 °C

  3. Suitable for vacuum

  4. Extremely compact design

  5. Easy integration and retrofitting in existing systems

  6. Compatible with capaNCDT sensors

  7. Calibratable design for high precision in thickness measurements